Nanopatterning in a compact setup using table top extreme ultraviolet lasers
نویسندگان
چکیده
منابع مشابه
Nanopatterning in a Compact Setup Using Table Top Extreme Ultraviolet Lasers
The recent development of table top extreme ultraviolet (EUV) lasers have enabled new applications that so far were restricted to the use of large facilities. These compact sources bring now to the laboratory environment the capabilities that will allow a broader application of techniques related to nanotechnology and nanofabrication. In this paper we review the advances in the utilization of E...
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ژورنال
عنوان ژورنال: Opto-Electronics Review
سال: 2008
ISSN: 1896-3757
DOI: 10.2478/s11772-008-0038-8